Precision Conductors:

• Width-to-thickness ratio ≥ 3; Minimum line width/spacing: 5μm; Tolerance: ±1μm

Via Metallization:

• Diameter: D ≥ 0.1mm; Aspect Ratio (D/H) ≥ 0.3
• Annular Ring Width: C ≥ 0.05mm
• Via Resistance: R ≤ 10mΩ

Precision Resistors:

• Precise control of line geometry and thickness
• Sheet Resistance Range: 5Ω/□ ~ 200Ω/□
• Temperature Coefficient of Resistance (TCR): 20 ± 60 ppm (-50~150°C)
• Resistance Tolerance: ±2%; Laser Trimmed: ±0.1%
• Resistor Line Width/Spacing: ≥ 5 μm